Abstract
AbstractAn X‐ray microscope equipped with a multiwalled carbon nanotube (MWCNT) cathode was developed. This system has ordinary scanning electron microscopy functions available for the precise adjustment of focusing conditions including astigmatism and an alignment of an electron beam. Owing to the adoption of a transmission type, X‐ray images with high magnification can be easily obtained. The diameter of an electron probe, which is one of the factors limiting a spatial resolution of X‐ray microscopes, was estimated to be ca 50 nm from a resolution of obtained SEM images. X‐ray images were taken as a demonstration of the X‐ray microscope and clear images with a resolution higher than 700 nm were successfully obtained. Copyright © 2008 John Wiley & Sons, Ltd.
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