Abstract
A new x-ray limit measurement method for extractor gauges has been developed using modulation of the hemispherical ion reflector. The measurement is possible from pressures as high as the 10−8 mbar range. X-ray limits for commercial extractor gauges have been examined for various emission currents and different gauge port geometries. The scatter in the x-ray limits measured is about 30% and the effect of gauge port geometry is more than 70%.
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Schedule a callMore From: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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