Abstract
A new type of piezoelectric crystal sensor coated with a sputtered noble metal (Pt, Pd, Ir, or Pt-Ir) film is proposed for the detection of inflammable gases, such as H 2, CO and isobutane diluted with air, in the temperature range 100–400 °C. Its sensing principle utilizes an increase in resonance frequency of the quartz crystal with the increase in temperature due to the oxidation of an inflammable gas on the coated catalyst film. Experiments show that the sensitivity increases linearly with H 2 concentration up to 0.4 vol.%, with a 90% response time of about 20 s to 0.3 vol.% H 2 at 200 °C. The sensitivity is dependent on the operation temperature due to the temperature-dependent resonance frequency of the crystal. Among the various coating films tested, sputtered Pt-Ir film gives the best sensor, with high sensitivity to inflammable gases and high resistance to interference by coexisting water vapour.
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