Abstract
A new thermionic emission microscope has been designed and constructed. It is a two lens microscope having a combination electrostatic-electromagnetic objective lens and an electromagnetic projector lens. The microscope has a magnification range of 78 to 5600× and a resolution of about 500 Å which is independent of magnification. It is capable of operating at a vacuum of 10−8 Torr at 1600°C. A specimen temperature and control system has been incorporated which operates with an accuracy better than ±5°C. The microscope stage is so constructed that the specimen can be independently moved in the x, y, and z directions. The electron-optical axis is horizontal to facilitate the recording of data.
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