New surface structure analysis of Ag-Si phase by quantitative auger electron spectroscopy method

Abstract

Ag or Au was deposited on a clean Si substrate at room temperature. These systems, Ag/Si and Au/Si, were annealed at various temperatures or various heating times. Due to the annealing, Ag or Au diffused into Si and/or Si diffused into the metal. The changes of the surface composition are analyzed by a quantitative Auger Electron Spectroscopy (AES) method which is newly developed as a non-destructive method. In the case of Ag/Si, Ag migrated into the Si substrate and/or Si diffused into Ag. Then, Ag-Si solid solution was produced. After the annealing, the Ag/Si system is changed into Ag/(Ag-Si)/Si of the three-phase structure. In the case of Au/Si (Au film thickness < 15 Å), the Au film thickness became thinner by annealing. The Au/Si system always keeps the Au/Si phase after annealing, while there was no Au-Si solution area. The difference between the Ag/(Ag-Si)/Si and the Au/Si structure is attributed to the reason that Au diffuses more quickly than Ag into the Si substrate. AES results after annealing cannot be explained by the model of the formation of the three-dimensional island structure which is commonly referenced.