Abstract
A new self-calibration principle for phase shift interferometry is introduced, involving a whole-field consideration of the information contained by the interferograms. The principle is illustrated for the three-sample case, which was previously known as not having a self-calibration capability. Three related self- calibrating algorithms for phase shift interferometry are proposed, all of them based on this principle. The input of the algorithms is the set of three interferograms, and the output consists in both the correct phase shifts and the phase map of the wavefront being analyzed. No information on the actual phase shifts has to be supplied.
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