Abstract
A positive working photosensitive polyimide based on hyperbranched poly (ether imide) (H-PEI) and 2, 3, 4-tris[1-oxo-2-diazonaphthoquinone-5-sulfonyloxy] benzophenone (D5SB) as a photoreactive compound has been developed. H-PEI was prepared by polycondensation of 3, 5-di-tert-butyldimethylsilyloxyphenyl-4-fluorophthalimide, followed by deprotection of tert-butyldimethylsilyl group with KF-HBr. The H-PEI has an excellent transparency to UV light. The photosensitive polyimide containing 30wt% of D5SB showed a sensitivity of 120MJ•cm-2 and a contrast of 2.8 when it was exposed to 365nm light followed by developing with a 2.38% aqueous tetramethylammonium hydroxide (TMAH) solution at room temperature.
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