New perspectives in silicon micro and nanophotonics

Abstract

In the last two decades, there has been growing interest in silicon-based photonic devices for many optical applications: telecommunications, interconnects and biosensors. In this work, an advance overview of our results in this field is presented. Proposed devices allow overcoming silicon intrinsic drawbacks limiting its application as a photonic substrate. Taking advantages of both non-linear and linear effects, size reduction at nanometric scale and new two-dimensional emerging materials, we have obtained a progressive increase in device performance along the last years. In this work we show that a suitable design of a thin photonic crystal slab realized in silicon nitride can exhibit a very strong field enhancement. This result is very promising for all photonic silicon devices based on nonlinear phenomena. Moreover we report on the fabrication and characterization of silicon photodetectors working at near-infrared wavelengths based on the internal photoemission absorption in a Schottky junction. We show as an increase in device performance can be obtained by coupling light into both micro-resonant cavity and waveguiding structures. In addition, replacing metal with graphene in a Schottky junction, a further improve in PD performance can be achieved. Finally, silicon-based microarray for biomedical applications, are reported. Microarray of porous silicon Bragg reflectors on a crystalline silicon substrate have been realized using a technological process based on standard photolithography and electrochemical anodization of the silicon. Our insights show that silicon is a promising platform for the integration of various optical functionalities on the same chip opening new frontiers in the field of low-cost silicon micro and nanophotonics.