Abstract
Copper beryllium (CuBe)is materials that are widely used for mechanical applications. In this paper,the use of copper beryllium for cantilever spring of a vibration sensor will beinformed. Cantilever spring plays important role in a vibration sensor, becauseit transfers vibration energy of the measured system into the sensor.Therefore, it is important to know the dynamic characteristics of thecantilever spring. An optical method, called Levitation Mass Method (LMM), isproposed to measure the dynamic characteristic of the cantilever. In themethod, the force of cantilever spring is measured as the inertial force workedon a mass. A pneumatic linear bearing is used to realize a linear motion withsufficiently small friction acting on the mass, i.e., the moving part of thelinear bearing. The inertial force acting on the mass is calculated from thevelocity of the mass, and the velocity is determined highly accurately by meansof measuring the Doppler shift frequency of the laser light beam reflecting onthe mass using an optical interferometer. It is shown that the proposed methodshows the dynamic characteristic of the vibration sensor well.
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