Abstract

It is shown that empirical sensitivity factors do not provide a reliable basis for quantitative chemical analysis by electron Spectroscopy for chemical analysis (ESCA), because the fraction of photoelectric events accompanied by intrinsic excitations depends on the electronic structure of the solid. This provides a serious source of error in surface analysis. It is pointed out that the area of the entire photoemission line, including the loss tail, is directly proportional to the photoelectric cross-section, and provides a way of using ESCA for bulk quantitative analysis. A method of chemical analysis based on this observation is outlined. It has the advantage of being largely insensitive to surface segregation and surface contamination.

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