Abstract
A new method has been proposed for analyzing the periodic structure of a multilayered sample by the differential anomalous small-angle X-ray scattering method in the reflection geometry. The scattering peaks due to the periodically layered structure in the small angle region are often observed with a large background intensity. These peak intensities strongly depend upon the anomalous dispersion terms of the constituent element near its absorption edge. Thus, by taking a difference of these peak intensities observed at two energies near the edge, the scattering intensity attributed to various causes can be accurately eliminated except the periodically layered structure. Namely, only the intrinsic peak intensities are precisely determined by this method. Furthermore, this method is the most effective for analyzing the periodic structures of multilayers composed of the next neighboring elements in the periodic table. The experimental details and the usefulness of the present new method have been presented by obtaining the concentration profile of a Cu/Co multilayer using the peak intensity variation arising from the anomalous dispersion terms of Cu and Co near their K absorption edges.
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