New Logic State Measurement Technique For The Electron Beam Tester

Abstract

A multi-stroboscopic sampling (MSS) technique was devised for logic state measurement with the electron beam tester. Electron beam pulses are shot and secondary electron signals are sampled m times each repetition period of LSI operation. In addition, an interpolated s-curve (IPS) method was introduced in the MSS technique for quantitative voltage measurement. Using this technique, the measurement time required for 1024 logic states was reduced by 1/70 compared to the stroboscopic waveform measurement technique.