New instrumentation for time-resolved microanalysis using parallel EELS

Abstract

The new parallel detection EELS systems have opened up the possibility of performing time-resolved studies of compositional changes and the evolution of near-edge structure caused by radiation damage or positional changes across heterogeneous interfaces. Zaluzec has described a system using a 2-D CCD array in which one axis corresponds to time. Such a system can acquire 100 512-channel spectra in a time limited by the CCD readout and digitization time. Our system is an extension of an existing data acquisition system using modified software and a Gatan 666 parallel EELS equipped with a 1024-element 1-D photodiode array. We have taken advantage of the computer’s memory architecture to stack a time series of multiple spectra (or any portion of these spectra) in the extended memory space above 256 K-bytes. The 4 M-bytes of system memory enables storage of up to 1920 spectra 1024 channels long. For inner-shell edges, a 100-500 msec signal integration time per spectrum is typical. After acquisition the series of spectra are recovered from extended memory and are stored on disk. They can then be retrieved for post processing or can be played back through the display, from which VCR recordings can be directly made.