New insights into phase transformations in single crystal silicon by controlled cyclic nanoindentation

Abstract

Phase transformations in single crystal silicon were investigated by cyclic nanoindentation with controlled residual loads in the unloading process. Different phase transformations were observed at different residual loads, leading to appearance of pop-outs in different positions, which has never been reported before. Phase transformation mechanism in the reloading process was discussed by analyzing the slope change in the indentation displacement–time curve.