New high-resistivity thin film resistor material for Josephson logic circuits

Abstract

A high-resistivity thin-film resistor for Josephson logic devices has been experimentaly investigated. Resistivity measurements of Au1–xInx evaporated thin films demonstrate the existence of a resistivity maximum around x∠0.16 at liquid He temperature. A maximum resistivity of 0.14 μΩ m has been obtained, which is one order of magnitude higher than that of the previous AuIn2 compound resistor. The temperature dependence and x-ray diffraction experiments suggest that the resistivity maximum appears in the transition region from Au–In solid solution phase (x<0.16) to Au–In compound phase (x≳0.16). This means the resistivity maximum is mainly attributed to the contribution from impurity scattering in the Au–In solid solution.