Abstract
We have developed a new type of nonevaporable getter (NEG) pump. It is based on the getter strip St707, produced by SAES getters S.p.A, fitted into a CF-flanged container. The pump is activated at 400°C for 1 h and its pumping behavior is studied for H2, CO, and N2. The pumping speed is about 500 liters/s for H2, 230 liters/ for CO, and 130 liters/s for N2, which is in good agreement with our theoretical pumping model. While its performance is similar to those of commercial NEG pumps, it is definitely more compact, inexpensive, and easy to use. When coupled with single-penning cell, our NEG pump can replace conventional ion pumps in the design of compact ultrahigh vacuum (UHV) systems. Its first application will be as an efficient and compact pumping device for portable UHV enclosure.
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