New Flexure Parallel-Kinematic Micropositioning System With Large Workspace

Abstract

Flexure-based micropositioning systems with a large workspace are attractive for a variety of precision engineering applications. In this paper, a new idea of multistage compound parallelogram flexure is proposed for the mechanism design of a novel parallel-kinematic XY micropositioning system, which has a motion range larger than 10 mm along with a compact structure. The established quantitative models and the stage performances are validated by conducting finite-element analysis (FEA) and experimental studies. Moreover, an enhanced model-predictive control (EMPC) is presented for positioning control of the system, which has a nonminimum-phase plant. It is shown that the EMPC is capable of producing a low magnitude of output tracking error by imposing an appropriate suppression on the control effort. Simulation and experimental studies reveal that the EMPC scheme outperforms the conventional proportional-integral-derivative (PID) and MPC methods in terms of transient response speed and steady-state accuracy. The idea that is presented in this paper is extendable to design and control of other micro-/nanopositioning systems with either minimum- or nonminimum-phase plants.