Abstract
A multiple-layer microcoil is a promising candidate for micromagnetic sensors for probing cracks in pipes in power stations and plants. We proposed fabrication of multiple-layer microcoils combining Al anodic oxidation and photolithography, and conducted experiments with the following results: 1) Sputter-deposited Al was anodically oxidized and thickness of Al2O3 formed controlled by anodic-oxidation time. 2) A pattern with Al and Al2O3 was made by masking Al with photoresist to prevent anodic oxidation. 3) A multiple-layer Al and Al2O3 was fabricated by combining Al anodic oxidation and photolithography. 4) As these results shown, multiple-layer microcoils having both high inductance and low resistance were fabricated as proposed using a simple process and having a high potential application to smaller multiple-layer microcoils.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
