Abstract
Vibration limits the performance of the ultra-precision machine in numerous applications, thus the need to dissipate the effect of vibration has become crucial. This paper proposes a new design for a voice coil motor (VCM) actuator that can be used in the vibration isolators to dissipate the fluctuation in the broadband frequency. The VCM was designed to produce a proper force for the isolation of fluctuation. The magnetic flux modeling and force calculation were conducted. Obtained simulation results using finite element method were verified by comparison with experimental results. Comparing these two results, we demonstrated that proposed VCM actuator was constructed properly.
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