Abstract
A summary of the characteristics of turbo molecular pumps is followed by reflections on the development of new high performance turbo molecular pumps. An increase of the pumping speed can be obtained by increasing the rotor speed and/or by modifications of the rotor disc geometry. The interdependance of pumping speed and compression ratio is a decisive factor for the design of new turbo molecular pumps. Compression ratios for hydrogen below 300 result in a substantial reduction of the pumping speeds for light gases (H2, He). The choice between horizontal and vertical rotor is determined by the maximum effective pumping speed obtainable and by the problems of maintenance and servicing.
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