Abstract
In the last decade, the Fundamental Parameter (FT) method has been increasingly used in quantitative XRF analysis as an effective means for interelement effect corrections. Many authors have contributed to its continuous development both in theory and practice [1 - 26]. Among various implementations, the FP-alpha method has been used widely in bulk-sample analysis because of its unique advantage of speed [1 - 6]. In recent years, however, with the advent of faster computers, a rigorous full FP approach has become feasible and practical. This is especially true in the field of multilayer thin-film, analysis, where the FP-alpha approach has not yet been applied.
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