New design of the quantized Hall resistance array device

Abstract

National Metrology Institute of Japan have been proposed and fabricated the quantized Hall resistance (QHR) array devices, and confirmed the performance with uncertainty of as low as 10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-8</sup> . The new combinations of Hall bars have been designed ranging from 100 Ω to 1 MΩ. This new combinations realize the quantized resistance values more closely to decade values with fewer numbers of Hall bars. In the new design, 10-kΩ QHR array device consists of only 16 Hall bars, and this number is about 16 times lower than that in the previous design however the nominal value is same to previous one. This fact might allow us to evaluate each Hall bar in the array device.