Abstract
A new approach of measuring the quality factor of the reflection type microwave cavity resonator for calculating the complex dielectric permittivity of solid and liquid samples in the cavity perturbation technique is proposed. This approach, based on the measurement of reflected power from the cavity at resonance, effectively reduces the measurement procedure and increases the accuracy. As the quality factor can be measured very fast using this approach, this approach can be extended to monitor the conductivity decay of the semiconductor samples.
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