Abstract
Since micro manipulation is necessary for the handling of the micro order small objects, actuators suitable for a micro manipulator have long been desired. This paper proposes a simplified structure of the new electrostatic actuator with multi degrees of freedom(3 DOF and 6 DOF), which is different from the conventional ones. For the dexterous manipulation, versatile skillful motions are required and this can be easily accomplished by using the proposed micro actuator. In this study, a prototype of this micro electrostatic actuator is produced. In this paper, the nonlinear dynamics of this actuator is modeled, then the position control simulations are carried out with the proposed nonlinear feedback control method. Design method and experimental position control results of the prototype micro actuator are also shown for the discussion. Moreover, we introduce the optical actuator which has advantages of (i) non-contact control and (ii) control signal transmission. These advantage will become important for the next actuators for the high-precision micro systems.
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