Abstract
The neutralization of He ions scattered from a Ca surface, as well as Al and Cu surfaces as references, is discussed on the basis of the incident energy dependence of low energy ion scattering (LEIS) spectra. The neutralization probability obtained for Ca is much higher than that expected on the basis of the Auger mechanism, indicating that the collision-induced (CI) process is dominant for the neutralization. The markedly large background component in the LEIS spectrum for Ca, corresponding to the re-ionization at the surface of He ions scattered and neutralized in the bulk, is consistent with the high probability of a CI process.
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