Abstract
Neutral temperatures in inductively coupled CF4/O2/Ar mixture plasmas have been characterized by fitting the rotational envelope of emission spectra in a gaseous electronics conference reference cell. CF and CO are found to present different rotational temperatures with opposite trends with respect to pressure. It is proposed that CF is created as a rotationally and translationally hot molecule due to CF4 dissociation and the disparity in temperatures and temperature trend is indicative of incomplete equilibration of the CF with other neutral species in the plasma. This may have important consequences from the standpoint of understanding neutral reaction chemistries.
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