Abstract

In this paper, we will propose the neural networks integrated circuit (NNIC) which is the driving waveform generator of the 4.0, 2.7, 2.5 mm, width, length, height in size biomimetics microelectromechanical systems (MEMS) microrobot. The microrobot was made from silicon wafer fabricated by micro fabrication technology. The mechanical system of the robot was equipped with small size rotary type actuators, link mechanisms and six legs to realize the ant-like switching behavior. The NNIC generates the driving waveform using synchronization phenomena such as biological neural networks. The driving waveform can operate the actuators of the MEMS microrobot directly. Therefore, the NNIC bare chip realizes the robot control without using any software programs or A/D converters. The microrobot performed forward and backward locomotion, and also changes direction by inputting an external single trigger pulse. The locomotion speed of the microrobot was 26.4 mm/min when the step width was 0.88 mm. The power consumption of the system was 250 mWh when the room temperature was 298 K.

Highlights

  • Many studies have been done on microrobots for several applications such as precise manipulation, medical field, and so on [1,2,3,4,5]

  • We are studying about millimeter size microrobot system which can control the locomotion by active hardware neural networks

  • We constructed the 4.0, 2.7, 2.5 mm, width, length, and height size microrobot fabricating the silicon wafer by micro fabrication technology, reported the rotary-type actuator composed of heat stimulated artificial muscle wires in the robot, and driving waveform of the robot was generated by using packaged neural networks integrated circuit (NNIC) which was externally connected [18]

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Summary

Introduction

Many studies have been done on microrobots for several applications such as precise manipulation, medical field, and so on [1,2,3,4,5]. Some advanced studies of artificial neural networks have been focused on for applying to the robot systems. Using the mathematical neuron models in large scale neural network is difficult to process in continuous time because the computer simulation is limited by the computer performance, such as the processing speed and memory capacity. The construction of a hardware model that can generate oscillatory patterns was desired For this reason, we are studying about millimeter size microrobot system which can control the locomotion by active hardware neural networks. We constructed the 4.0, 2.7, 2.5 mm, width, length, and height size microrobot fabricating the silicon wafer by micro fabrication technology, reported the rotary-type actuator composed of heat stimulated artificial muscle wires in the robot, and driving waveform of the robot was generated by using packaged neural networks integrated circuit (NNIC) which was externally connected [18]. The whole system is a microelectromechanical systems (MEMS) microrobot

Biomimetics MEMS Microrobot
Mechanical Components
Locomotion Mechanisms
Neural Networks Integrated Circuit
Results and Discussion
Conclusions
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