Abstract

Subwavelength gratings (SWGs) that consist of net-grid patterns which have periods distributed in 2 dimensions are studied by rigorous coupled-wave approach (RCWA) and finite-difference-time-domain (FDTD) method. SWGs can be designed as infrared reflectors with reflectivity of 99.98% at 1.55μm while maintaining reflectivity higher than 99% across the 1.47-1.59μm wavelength range. We design these SWGs as the bottom mirrors in resonant cavity enhanced photodetectors (RCE-PDs) for optical communication system. Because SWGs can achieve high reflectivity as well as wide bandwidth, RCE PD's quantum efficiency is increased to 95.7% at 1.55μm and the device has a device size reduction.

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