Abstract
In a negative-ion source, the vibrational kinetics of molecules H <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> and the negative-ion H <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-</sup> transport are both important in order to understand and optimize H <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-</sup> extraction. In this paper, two different particle models are developed, simulating the expansion and extraction regions of a radio-frequency inductively coupled plasma negative-ion source. These models show the importance of gas- and plasma-surface interaction in the vibrational excitation of molecules and in the direct production of negative ions from the wall.
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