Nearly bird's beak-free local oxidation technology for controlled dielectric formation in deep silicon trenches

Abstract

Silicon deep trench isolation technology using local oxidation is reported. Scaled, high-density trench capacitors were fabricated with varying trench aspect ratios. Nearly bird's beak-free local oxidation resulted in a controlled growth of silicon dioxide on the trench bottom surfaces and significantly improved the trench gate MOS isolation characteristics. Detailed MOS capacitance measurements were performed and wafer yield in excess of 90% was demonstrated across 4 inch diameter silicon wafers.