Abstract
Abstract. A circular wire grid polarizer (WGP) as a device to produce high quality radially polarized light at nearUV wavelength range (in particular at the wavelength of ฮป ยผ 405 nm) is presented starting from design modelingfollowed by fabrication and performance analysis. The wire grid consists of concentric subwavelength metalliccylinders covering a high quality glass substrate and fabricated using an electron beam pattern generator andetchingtechniques.Thetheoreticalmodelingusingtherigorousfinite-elementmethodandmeasurementsofthetransmittedlightthroughthemaskhavebeenevaluated.AnanalysisonadjustmentsofthegeometryoftheWGPto produce the optimum focused spot of the longitudinal component of the electric field, its implementation, andqualitative testing are also presented. ยฉ 2015 Society of Photo-Optical Instrumentation Engineers (SPIE) [DOI: 10.1117/1.OE.54.10.104101] Keywords: wire grid polarizer; radially polarized light; metallic grating; finite-element method; near ultraviolet wavelength range;physical optics; diffractive optics.Paper 150862 received Jun. 24, 2015; accepted for publication Aug. 31, 2015; published online Oct. 6, 2015.
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