Abstract
Intersubband transitions (ISBTs) in narrow InAs∕AlSb multiple quantum wells (MQWs) were investigated for well widths, d, ranging from 5 nm down to 1.8 nm with 10, 20, or 60 periods. In order to observe a strong ISBT signal, a heavy silicon doping was made in each InAs quantum well. Delta doping was employed for the narrowest wells to prevent silicon incorporation into the AlSb barrier layers. As the well width decreased, the ISBT signal of the MQWs decreased. However, it persisted down to d=2.1nm with a sheet doping density in each quantum well of 9×1012cm−2 and 60 periods. The ISBT signal observed for d=2.1nm was peaked at an energy of 650 and 670 meV at 300 and 77 K, respectively. These are the highest energy values ever observed for ISBTs in InAs∕AlSb MQWs.
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