Abstract
Abstract Laser-induced wet chemical etching of titanium and stainless steel foils in phosphoric and sulphuric acid was investigated. Focussing of cw-Nd:YAG laser radiation at power levels up to 7 W to a focal spot diameter of about 25 μm resulted in chemical etching of grooves at speeds up to 90 μm s −1 and cutting of foils at velocities of 10–50 μm s −1 . Aspect ratios up to 2 were obtained. Fabrication of free-standing microstructures is demonstrated.
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