Abstract
Abstract Nd-Fe-B films with perpendicular magnetic anisotropy are important for various applications. Most common process to prepare Nd-Fe-B thin films with perpendicular magnetic anisotropy is the heteroepitaxy process. Here, Nd-Fe-B thin films with perpendicular magnetic anisotropy were prepared by a two-step process. Amorphous and magnetically soft thin films were first deposited. Crystallized, magnetic hard thin films were obtained by rapid thermal annealing of the as-deposited films. A clear correlation between perpendicular magnetic anisotropy of annealed state and the domain configuration in the as-deposited state was noticed. Films prepared without substrate heating, with additions of Tb show perpendicular coercivity which is larger than 24 kOe.
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