Abstract
The possibility for adopting niobium thin film coated copper (Nb/Cu) quarter wave resonators (QWRs) in the low energy section of CiADS project[1] is being evaluated. Comparing with bulk niobium cavities, the Nb/Cu cavities feature a much better thermal and mechanical stability at 4.5 K. Two 325 MHz Nb/Cu QWR cavities have been fabricated at IMP, to demonstrate whether the niobium coated copper cavity technique can meet the requirements of CiADS. The cavity is coated with biased DC diode sputtering technique. This paper covers resulting film characters, vertical tests with the evolution of the sputtering process, and improvements to mitigate issues we met.
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