Abstract
Perfectly orthogonal two-dimensional gratings are crucial components in the calibration of scanning microscopes and displacement measurements of planar encoders. In this study, we propose a new approach to achieve self-traceable orthogonality by utilizing perpendicular diagonals inside a rhombus shape. Two-step laser-focused Cr atomic deposition is used to fabricate a rhombus array of dots with good uniformity, repeatability, accuracy, and stability. A theoretical analysis indicates that the non-orthogonality uncertainty budget is as low as 0.0027° for the two-dimensional Cr nanogratings with a self-traceable pitch of 212.8 nm, which makes the fabricated two-dimensional gratings promising as a natural square ruler with an extremely low uncertainty at the nanoscale.
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