Abstract
By adjusting the sputtering rate and gas pressure, it is possible to form nanoparticles of different sizes, phases, and materials. We have investigated the spatial distribution of sputtered particle formation using a vertical, linear arrangement of substrates. Collecting the particles soon after they are formed, before they have time to grow and agglomerate, allows one to obtain a narrow size distribution. In the case of molybdenum, a narrow distribution of cubic particles is formed at relatively large distances (8 cm) from the source. These cubic particles collide and self-assemble in the vapor into arrays of larger cubic particles. The particle size histograms are fitted to lognormal distribution functions. How supersaturation occurs is discussed qualitatively as a function of the distance from the substrate, sputtering rate, and the mean free path in the vapor. This method of nanocrystalline particle formation has potential use in magnetic and opto-electronic (quantum dot) applications, where a narrow size distribution is required.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
