Narrow-linewidth tunable ArF* excimer-laser source

Abstract

The generation of narrow-linewidth tunable radiation from excimer lasers has been a topic of considerable investigation recently.1 Because of the short laser wavelengths generated, such sources are ideal tools for multiphoton spectroscopy in the VUV.2 Because conventional excimer lasers generally operate with broadband laser output and poor beam divergence, ways of Improving the performance of these sources have been sought. Perhaps the most useful technique in this regard is to inject a low level of narrow-linewidth tunable radiation info an excimer laser discharge and thereby make use of the high gain of the excimer systems to amplify the Input beam to high power level. This technique has been used successfully with many of the rare gas halide excimers.1 Experimental complications associated with generating narrow- linewidth readily tunable radiation at 193 nm, however, have made the application of this method to the ArF* excimer, potentially one of the most useful wavelengths for VUV multiphoton spectroscopy, difficult.