Abstract
Nanoscale electromechanical systems – nanotweezers with highly intelligent functions – based on an electrostatic comb drive actuator have been developed for the manipulation and interrogation of nanostructures. These nanotweezers can detect contact with the substrate or sample during approaching or gripping operation by monitoring the resonance state change of the comb drive. A contact position reproducibility of 10 nm is obtained, which prevents the crushing of the probe against the substrate and increases the reliability of sample gripping. The manipulation and detection functions of these nanotweezers are evaluated in a focused ion beam/scanning electron microscopy (FIB/SEM) system.
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