Abstract
In this work, the mechanical properties of new hard coatings based on a multilayerstructure have been investigated at the nanometre scale. A multilayer structure ofCN/TiCN/TiN on silicon substrate has been deposited by dual-ion-beam sputtering. Thenanomechanical properties have been determined measuring nanoindentation, friction andwear by means of an atomic force microscope (AFM) on the multilayer after deposition ofeach layer. Nanoindentation and wear experiments were performed with the AFM using adiamond tip whereas the friction behaviour of each layer was evaluated taking AFMfriction images with silicon nitride tips while the normal force was increased during thescanning.The hardness and the resistance to wear of the system are observed to increaseas the next layer is deposited and the multilayer is completed. In contrast, thefriction is shown to decrease in the same way. All these results indicate that themultilayer combines ultrahard behaviour with good tribological and wear properties.
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