Abstract
Silane coupling regent [3-mercaptopropyl trimethoxysilane (MPTS)] was prepared on silicon substrate to form two-dimensional self-assembled monolayer (SAM) and the terminal −SH group in the film was in situ oxidised to −SO3H group to endow the film with good chemisorption ability. Thus, TiO2 thin films were deposited on the oxidised MPTS-SAM to form composite thin films, making use of the chemisorption ability of the −SO3H group. Atomic force microscope (AFM) and contact angle measurements were used to characterise TiO2 films. Adhesive force and friction force of TiO2 thin films and silicon substrate were measured under various applied normal loads and scanning speed of AFM tip. Results showed that the friction force increased with applied normal loads and scanning speed of AFM tip. In order to study the effect of capillary force, tests were performed in various relative humidity. Results showed that the adhesive force of silicon substrate increases with relative humidity and the adhesive force of TiO2 thin films only increases slightly with relative humidity. Research showed that surfaces with more hydrophobic property revealed the lower adhesive and friction forces.
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