Abstract

We report recent achievements in adapting industrially used solar cell processes on nanotextured surfaces. Nanostructures were etched into c-Si surfaces by dry exothermic plasma-less reaction of F species with Si in atmospheric pressure conditions and then modified using a short post-etching process. Nanotextured multicrystalline wafers are used to prepare Al-BSF solar cells using industrially feasible solar cell proc- essing steps. In comparison to the reference acidic textured solar cells, the nanostructured cells showed gain in short circuit current (Jsc) of up to 0.8 mA/cm2 and absolute gain in conversion efficiency of up to 0.3%. The best nanotextured solar cell was independently certified to reach the conversion efficiency of 18.0%. (© 2015 WILEY-VCH Verlag GmbH &Co. KGaA, Weinheim)

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