Abstract
ZnO thin films were deposited onto glass substrate for various deposition cycles by successive ionic layer adsorption and reaction method. Structural studies were confirmed that the films are polycrystalline with hexagonal wurtzite structure. SEM studies revealed the surface had closely packed spherical particles with pores. The transmission range was found to be above 75% and the band gap was calculated for all samples using optical studies. The changes in the oxidation state of ZnO thin film was studied using X-ray photoelectron spectroscopy. The chemical compositions of ZnO were confirmed by FTIR spectrum. The improved crystalline of ZnO thin film (50 cycles) has been chosen for the fabrication of ammonia vapour sensor. The vapour sensing behaviour of the film was observed for various concentrations of ammonia at an optimized operating temperature of 200 °C. The lowest detection limit was found to be 1 ppm of ammonia vapour concentration.
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