Abstract
In this paper, we present the first sensor ever built using films grown by supersonic beam of cluster oxides as sensing material. Supersonic cluster beams, produced by a pulsed micro-plasma cluster source have successfully used to prepare nanocrystalline thin films of TiO/sub 2/. The sensors, prepared by using different deposition parameters, were suitable for use in a gas sensor array for electronic nose. Sensors showed a quite good response to ethanol, methanol and propanol. Principal component analysis was used as method for testing the array capability in discrimination and recognition of the volatile compounds.
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