Abstract

A specific matrix sensor that can operate at low temperatures and has a high sensing response is crucial for monitoring flammable VOC gases. In this study, a nanostructured SnO2 thin film was successfully produced using a suitable chemical deposition method, and its sensing properties were comprehensively analyzed. The SEM images revealed that the thin film of the nanostructured SnO2 is made up of two different sizes of broccoli-like structure nanoparticles. The sensor, which is based on this unique micronano structure, demonstrated a high sensing response (44), low operating temperature (200 °C), and fast response time (6s). Additionally, the nanostructured sensor exhibited excellent resistance to humidity interference and long-term stability. Moreover, DFT is employed to evaluate the electronic properties and to systematically explain the gas sensing mechanism of the nanostructured sensor based on the SnO2 thin film.

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