Abstract
A sensor for detection of acetone vapors using nanostructured ITO thin film is reported. The ITO film was sputter-deposited on glass substrate using RF magnetron sputtering at 200 W RF power in argon atmosphere at 20 mTorr pressure. The film was then annealed at 450°C for 1h in air. The sensing area was kept to be 3 mm × 3 mm. Two aluminum pads of 7 mm × 4 mm size were formed using lift-off technique for electrical contacts. The crystallinity, microstructure, and acetone vapor-sensing properties were systematically investigated. The stability of the sensing films with aging and temperature variations was also investigated.
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