Abstract
A high-speed optical humidity sensor was fabricated from a nanostructured titanium dioxide thin film. A refractive index depth profile designed to yield a narrow-bandpass optical interference filter was obtained through nanoscale porosity variations produced by a physical vapor deposition technique known as glancing angle deposition (GLAD). The GLAD process provides film morphology control on the 10 nm scale through a combination of deposition at highly oblique vapor incidence angles and controlled substrate motion. Under varying humidity conditions the transmittance spectrum of the filter shifts due to effective index changes of the porous structure resulting from water vapor adsorption/desorption. Performance analysis has shown that this device is highly sensitive, exhibits minimal hysteresis, and is extremely fast. The adsorption and desorption response times were measured to be 270 ms and 160 ms, respectively.
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