Abstract
Microelectrode arrays (MEAs) are state-of-the-art devices for extracellular recording and stimulation on biological tissue. Furthermore, they are a relevant tool for the development of biomedical applications like retina, cochlear and motor prostheses, cardiac pacemakers and drug screening. Hence, research on functional cell-sensor interfaces, as well as the development of new surface structures and modifications for improved electrode characteristics, is a vivid and well established field. However, combining single-cell resolution with sufficient signal coupling remains challenging due to poor cell-electrode sealing. Furthermore, electrodes with diameters below 20 µm often suffer from a high electrical impedance affecting the noise during voltage recordings. In this study, we report on a nanocavity sensor array for voltage-controlled stimulation and extracellular action potential recordings on cellular networks. Nanocavity devices combine the advantages of low-impedance electrodes with small cell-chip interfaces, preserving a high spatial resolution for recording and stimulation. A reservoir between opening aperture and electrode is provided, allowing the cell to access the structure for a tight cell-sensor sealing. We present the well-controlled fabrication process and the effect of cavity formation and electrode patterning on the sensor's impedance. Further, we demonstrate reliable voltage-controlled stimulation using nanostructured cavity devices by capturing the pacemaker of an HL-1 cell network.
Highlights
Merging biological tissue and electronics provides versatile opportunities for research in biomedical and life sciences
Electrode impedance, sealing resistance between cell and sensor, electrode size, and density are the most important parameters for on-chip electrophysiology since they correlate with the signal-to-noise ratio and spatial resolution.[12]
A high electrode density is given by microelectrode arrays (MEAs), which are the tools of choice in many extracellular in vitro and in vivo investigations.[13]
Summary
Merging biological tissue and electronics provides versatile opportunities for research in biomedical and life sciences. Optimizing the physical interface properties remains a major task in bioelectronics.[12,21] Various attempts in material research and design of sensor surfaces aim for a functional cell-sensor interface and an efficient signal transmission. Different layouts have been realized to support cell guidance,[22] adherence,[21] and sealing[23] for electrical and chemical recording.
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