Abstract

Nanostructured, sub-wavelength anti-reflection layers (NALs) have attracted much attention as a new generation of anti-reflection surfaces. Among different designs, sub-wavelength periodic nanostructures are capable of enhancing transmission of coherent light through an interface without inducing scattering. In this work, we have explored a new profile for periodic NALs capable of transmitting IR light with higher efficiency compared to NALs based on a parabolic profile. To achieve high transmission and low diffraction, the profile and pitch of the nanostructured NALs are calculated using a combination of a multi-layer modeling and Rigorous Coupled Wave (RCWA) analysis.

Highlights

  • Traditional anti-reflection coatings (ARCs) are based on destructive interference of light from two or more interfaces [1] [2]

  • To achieve high transmission and low diffraction, the profile and pitch of the nanostructured NALs are calculated using a combination of a multi-layer modeling and Rigorous Coupled Wave (RCWA) analysis

  • One can reduce the reflection by gradually increasing the refractive index from air to substrate

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Summary

Introduction

Traditional anti-reflection coatings (ARCs) are based on destructive interference of light from two or more interfaces [1] [2]. Nanostructured ARC layers (NALs [9]) on the other hand, work by a gradual, adiabatic change of effective refractive index from that of the incidence medium (air) to that of the bulk material (silicon in our case). These structures are referred as moth-eye structures [10] due to their resemblance to the surface of a moth’s eye [11]. This work is done at Center for High Technology Materials (CHTM) at University of New Mexico

Theory of Antireflection Layers
Nanostructures as Antireflection Layer
Smoothing Index Transition for the Unit Cell
Calculation of the Unit Cell Profile
Determination of the Fill-Factor
NAL Slice Thicknesses and Profile Design
Transmission through NAL
Transmission through NAL as a Function of Wavelength and Pitch
Comparison with Parabolic NALs
Conclusions
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