Abstract
In the present work, ZnO and ZnO:Al (AZO)was deposited on silicon and porous silicon substrates by chemical Spray Pyrolysis. The porous silicon (PS) substrates were formed by electrochemical anodization on p-type (100) silicon wafer. XRD analysis showed that highly (002) oriented ZnO thin films were formed. SEM and AFM have been used to understand the effects of the substrate on sensing properties of the samples. The ideality factors (n ~ 2) of the prepared heterojunction are observed in the interim bias voltage range. The gas sensing results show that the sensitivity of ZnO and AZO on Si substrates for detecting 750 ppm ethanol vapor was ~27 and methanol vapor was ~25 at an operating temperature of 473°K, the sensitivity of ZnO and AZO on PS substrates was ~37 for ethanol and ~30 for methanol at the same parameters.
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